SEMICONDUCTOR VACUUM EVAPORATOR

ㆍUsed in all high-vacuum coating operation including high-vacuum operation for evaporating devices.

ㆍBy using this device, you can greatly save time required to achieve vacuum, and along with rapid vacuum and maintaining low partial pressure of water vapor, manufacturing of high-quality vacuum product is made possible. In particular, you can expect revolutionary increase in production capacity.

ㆍUsing cryo cold allows superior adhesion during the evaporation in high-vacuum devices. Extremely low levels in partial pressure of water vapors makes superior and clear color expressions possible.

ㆍPrimary applications include numerous industrial applications such as semiconductor LCD devices, SPUTTER devices, EMI coating, plastic metal coating, various vacuum evaporators including film evaporation, and research apparatuses.

ㆍUsed in all high-vacuum coating operation including high-vacuum operation for evaporating devices.

ㆍBy using this device, you can greatly save time required to achieve vacuum, and along with rapid vacuum and maintaining low partial pressure of water vapor, manufacturing of high-quality vacuum product is made possible. In particular, you can expect revolutionary increase in production capacity.

ㆍUsing cryo cold allows superior adhesion during the evaporation in high-vacuum devices. Extremely low levels in partial pressure of water vapors makes superior and clear color expressions possible.

ㆍPrimary applications include numerous industrial applications such as semiconductor LCD devices, SPUTTER devices, EMI coating, plastic metal coating, various vacuum evaporators including film evaporation, and research apparatuses.

Semiconductor LCD devices, SPUTTER devices

EMI coating, plastic metal coating, optical lens

DOP, vacuum evaporation and thin film coating in cell phone EMI coating

Various very-low temperature industrial vacuum devices

Other vacuum-related research apparatuses

ㆍCompression ratio can be reached in relatively lower conditions, preventing oil carbonization through occurrence of high-pressure conditions in the initial

operation compared to existing systems. Oil discoloration does not occur even during long operations, allowing sustainable, long-term operational system stability.

ㆍThe combination of our exclusive, environmentally friendly refrigerant and the stable system allows very-low temperature to be reached in a short period of time.

In addition, by installing an appropriate heating coil and reducing defrost time, economic benefits are increased through reduced operation time and efficient management.

ㆍDevices supplied by our company have been recognized for their stability and dependability. We received a very small number of after-service support request during the last 4 ~ 5 years.

We are actively discussing exporting the product to a Japanese vacuum device company who have recognized its superiority.

ㆍCompression ratio can be reached in relatively lower conditions, preventing oil carbonization through occurrence of high-pressure conditions in the initial operation compared to existing systems. Oil discoloration does not occur even during long operations, allowing sustainable, long-term operational system stability.

ㆍThe combination of our exclusive, environmentally friendly refrigerant and the stable system allows very-low temperature to be reached in a short period of time.

In addition, by installing an appropriate heating coil and reducing defrost time, economic benefits are increased through reduced operation time and efficient management.

ㆍDevices supplied by our company have been recognized for their stability and dependability. We received a very small number of after-service support request during the last 4 ~ 5 years.

We are actively discussing exporting the product to a Japanese vacuum device company who have recognized its superiority.

Model		SCH-1100 / SC-1100	SCH-1500 / SC-1500
Dimensions(mm)		810 W x 710D x 1930H	810 W x 750D x 1930H
Power Supply(3ph voltage)		3Ø 380V	3Ø 380V
Compressor		50/60Hz	50/60Hz
Condenser Water	KW	11kw	15kw
	water ℓ/min	20ℓ/min	30ℓ/min
	water temoerature / ℃	15℃ ~ 20℃	15℃ ~ 20℃
	IN(mm)	25mm	25mm
	OUT(mm)	25mm	25mm
Defrosting coil temperature (Hot Gas)		20℃ ~ 50℃	20℃ ~ 50℃
weight		-140℃ ~ -160℃	-140℃ ~ -160℃
Waste gas		450kg	500kg
Surface area		100,000 ℓ/sec	150,000 ℓ/sec
Cryo coil pipe size		10,000㎠	10,000㎠
Cryo coil pipe outsider length	mm	12.7mm	12.7mm
Cryo coil pipe outsider length	m	6m	6m

※ SCH - Cool, Defrost, stand-by
※ SCH - Cool전용

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	Revolutionary reduction to the production cycle by reducing time required to achieve vacuum
	Low levels in partial pressure of water vapor allows manufacturing of high-quality products
	State-of-the art, simple and clear design offer stability
	Patented oil separator system
	Maintains stable temperature and high vacuum
	Clear, vibrant colors during vacuum evaporation
	Proven stability and reliability, prompt after-sales support

SEMICONDUCTOR VACUUM EVAPORATOR

Semiconductor vacuum evaporator

Semiconductor vacuum evaporator application

◎ Basic application

◎ Primary application

Semiconductor LCD devices, SPUTTER devices

EMI coating, plastic metal coating, optical lens

DOP, vacuum evaporation and thin film coating in cell phone EMI coating

Various very-low temperature industrial vacuum devices

Other vacuum-related research apparatuses

Characteristics, forecast, and advantages of using semiconductor vacuum evaporator

◎ Application characteristics and forecast

◎ Advantages of semiconductor vacuum evaporator

Semiconductor vacuum evaporator specification

Model

Semiconductor vacuum evaporator Performance analysis

◎ Cryo coil exhaust velocity

◎ Cryo coil surface temperature and partial pressure of water vapor

◎ Cool(Diffusion Pump) Temperature Graph

◎ Diffusion Pump piping diagram

◎ Cool(Diffusion Pump) Temperature Graph

◎ Diffusion Pump piping diagram

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