SEMICONDUCTOR VACUUM EVAPORATOR


  Semiconductor vacuum evaporator

Using our company’s exclusive special mixed refrigerant in conjunction with a stable system, this very-low temperature cooling system is
capable of tope-of-the-line cooling and defrosting speed. Recognized worldwide, this device is exported to all parts of the world.


  Semiconductor vacuum evaporator application
◎ Basic application

ㆍUsed in all high-vacuum coating operation including high-vacuum operation for evaporating devices. 


ㆍBy using this device, you can greatly save time required to achieve vacuum, and along with rapid vacuum and maintaining low partial pressure of water vapor, manufacturing of high-quality vacuum product is made possible. In particular, you can expect revolutionary increase in production capacity. 


ㆍUsing cryo cold allows superior adhesion during the evaporation in high-vacuum devices. Extremely low levels in partial pressure of water vapors makes superior and clear color expressions possible. 


ㆍPrimary applications include numerous industrial applications such as semiconductor LCD devices, SPUTTER devices, EMI coating, plastic metal coating, various vacuum evaporators including film evaporation, and research apparatuses.

◎ Primary application

  Characteristics, forecast, and advantages of using semiconductor vacuum evaporator
◎ Application characteristics and forecast

ㆍCompression ratio can be reached in relatively lower conditions, preventing oil carbonization through occurrence of high-pressure conditions in the initial operation compared to existing systems. Oil discoloration does not occur even during long operations, allowing sustainable, long-term operational system stability. 


ㆍThe combination of our exclusive, environmentally friendly refrigerant and the stable system allows very-low temperature to be reached in a short period of time. 

    In addition, by installing an appropriate heating coil and reducing defrost time, economic benefits are increased through reduced operation time and efficient management. 


ㆍDevices supplied by our company have been recognized for their stability and dependability. We received a very small number of after-service support request during the last 4 ~ 5 years. 

    We are actively discussing exporting the product to a Japanese vacuum device company who have recognized its superiority.

◎ Advantages of semiconductor vacuum evaporator 

Revolutionary reduction to the production cycle by reducing time required to achieve vacuum


Low levels in partial pressure of water vapor allows manufacturing of high-quality products


State-of-the art, simple and clear design offer stability


Patented oil separator system


Maintains stable temperature and high vacuum


Clear, vibrant colors during vacuum evaporation


Proven stability and reliability, prompt after-sales support


Low levels in partial pressure of water vapor allows manufacturing of high-quality products


State-of-the art, simple and 
clear design offer stability 


Patented oil separator system


Maintains stable temperature and high vacuum


Clear, vibrant colors during vacuum evaporation


Proven stability and reliability, 

prompt after-sales support


  Semiconductor vacuum evaporator specification
Model
SCH-1100 / SC-1100
SCH-1500 / SC-1500
Dimensions(mm)
810 W x 710D x 1930H
810 W x 750D x 1930H
Power Supply(3ph voltage)
3Ø 380V
3Ø 380V
Compressor
50/60Hz
50/60Hz
Condenser Water
KW
11kw
15kw
water  ℓ/min
20ℓ/min
30ℓ/min
water temoerature / ℃
15℃ ~ 20℃
15℃ ~ 20℃
IN(mm)
25mm
25mm
OUT(mm)
25mm
25mm
Defrosting coil temperature (Hot Gas)
20℃ ~ 50℃
20℃ ~ 50℃
weight
-140℃ ~ -160℃
-140℃ ~ -160℃
Waste gas
450kg
500kg
Surface area
100,000 ℓ/sec
150,000 ℓ/sec
Cryo coil pipe size
10,000㎠ 
10,000㎠
Cryo coil pipe outsider length
mm
12.7mm
12.7mm
m
6m
6m


※ SCH - Cool, Defrost, stand-by
※ SCH - Cool전용


  Semiconductor vacuum evaporator Performance analysis
◎ Cryo coil exhaust velocity
Cryo coil surface temperature and partial pressure of water vapor
◎ Cool(Diffusion Pump) Temperature Graph
Diffusion Pump piping diagram
◎ Cool(Diffusion Pump) Temperature Graph
Diffusion Pump piping diagram
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Refrigerator Manufacturing License Number 2010450010-16-05-00002 

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